Instruction for the Hummer V sputter coater

Caution: Do not touch the prep or the inner surface of the chamber with your bare hand, use forcep or glove!

Note: We have never checked the actual thickness of the deposition, but the manufacturer indicates it should be about 20 nm per minute.

1. open the main valve on top of the Argon gas cylinder counterclockwise 1 complete turn, the low pressure gauge on the left should read 5 psi and the high pressure gauge on the right should be > 300 psi

   Note: Please contact Facility staff if pressure readings are off. Coating can be done without Argon but the quality may be poor.

2. place Pressure Control lever in vent position (lever points out)
3. put Mode Selector (top right) on Plate D/C
4. load the chamber

   Note: The 2 gaskets on the glass chamber have a thin coat of Apiezon, a high vacuum grease, they will stick to the top and base.

   1. gently slide the top back and forth a couple times to release it from the gasket, then push up to remove it
   2. set it next to the glass chamber with the target pointing up and make sure not to strain or cut the high tension cables
   3. gently slide the glass chamber back and forth a few times to release it from the base
   4. place the glass chamber on the top
   5. insert or place the specimen stubs on the pedestal
   6. visually inspect the rubber gaskets and mating surface to make sure there is no debris, clean with Ross lens paper, if needed
   7. replace the glass chamber
   8. replace the top and align the tab in the back with the post to avoid straining the cable
5. close Pressure Control valve (lever points down)
6. set the Fine Metering Valve to 6 o'clock position (between 9 - 6 is fine, too)

   Warning: The valve should turn easily, if not, please STOP and notify Facility staff. Forcing it will damage the valve and one should never need to apply more than a half turn.

7. switch main Power on
8. wait for vacuum to register just below 55 mtorr, this will take about 5 min
9. set the Fine Metering Valve to 3 o'clock position (or between 12 - 3) to stabilize the vacuum at 65 mtorr
10. switch Process Control to Manual
11. turn Hi Voltage Control switch on
12. slowly turn the Hi Voltage knob clockwise about 1 division/s to get 10 mA on the Plasma Current Meter, and adjust the Fine Metering Valve to keep the vacuum at 65 mtorr; maintain the 10 mA current and 65 mtorr condition throughout the coating period

    Note: You should see a purplish blue plasma. The knob should be set around upper 3–lower 6 but mostly at 4.

13. There are 2 ways to time the coating process
    • use the timer on Process Control
      1. set timer on Process Control to 2.5–3 min.
      2. switch Process Control to Auto so plasma will terminate when number of minutes selected has expired
    • use an external digital timer
      1. set timer to 2.5–3 min. and activate timer
14. slowly turn the Hi Voltage knob counterclockwise to zero, switch off the Hi Voltage
15. lift the Pressure Control lever to vent and IMMEDIATELY turn main Power off

    Warning: Do not leave the system under vacuum when the pump is not running, because pump oil will be sucked into the glass chamber.

16. set the Fine Metering Valve to 6 o'clock position
17. open the chamber as noted in step 4 and remove your preps
18. complete steps 4 to 17 for more runs
19. at the end of the session, carefully replace the glass chamber and top
20. close the main valve on top of the Argon gas cylinder
21. fill out the log book and clean up the work area

---

You can contact us for comments and inquiries.

Updated on 2012 February 22. Copyright© 2012 University of Washington, unless indicated otherwise.

Department of Biology • UW