NTUF Research Tool Inventory

E-beam Lithography (EBL)

The NTUF will be discontinuing the use of the NPGS system (Nabity) on March 31, 2015. The system will be shut down after that date. Please take this into consideration when planning experiments. As an alternative, the WNF has a world-class nanolithography tool in the JEOL JBX-6300FS operated by Rick Bojko. Rick's extensive experience with EBL enables him to simplify the process for you without over-simplifying the fabrication of your devices. You will benefit through far greater precision and consistency in your devices.

Please direct any questions to: ntuf@uw.edu

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