The Sirion scanning electron microscope provides ultra-high resolution, low kV secondary electron and backscattering information from conductive and non-conductive samples using through-the-lens detection technology. For standard gold on carbon substrate, the resolution is 1-3 nm at accelerating voltages of 1 kV - 30 kV.
A combined Energy Dispersed Spectrometer (EDAX) system allows ultra-high resolution digital imaging and X-ray mapping. Standard features of the EDAX software include spectra, image, and elemental map collection. The standard 10-liter dewar EDAX detecting unit provides performance across a broad range of applications and environments. It has a narrow diameter end cap with a fixed window that separates the internal components and vacuum of the detecting unit from the microscope chamber. The detector is configurable for light element analysis down to lithium.