1st Nano Training Course: SEM, EBL, and Soft Lithography

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Venue:
University of Washington
Seattle, Washington
1st Nano Training Course – SEM, EBL, and Soft Lithography
Date and Time: 8:30 am – 4:30 pm on October 27, 2006
Location: Room 310, Husky Union Building (HUB) and Fluke Hall 117, University of Washington Campus (campus map)

Who Should Attend:
Anyone with a science/engineering background should have the necessary skills to gain much from the 1st Nano Training Course.  The course will begin with lectures on fundamentals before proceeding to tools, and then to demo of specific tools.

Technical Content:

Scanning Electron Microscope (SEM) is used for imaging surfaces of materials through interactions between probe electrons and the specimen. These interactions - back-scattered electrons, secondary electrons, and x-rays – are detected and analyzed to create images.

Electron Beam Lithography (EBL) generates patterns on surfaces, using beams of electrons to create features as small as 20 nm. The primary advantage of EBL lies in its capacity to overcome the diffraction limit of light. However, the serial nature of the process makes it less desirable for generating larger patterns.

Soft lithography enables rapid prototyping of micro- and nano-structures and devices on planar, curved, or flexible substrates at low cost. Based on printing, molding, and embossing with an elastomeric stamp/mold, five patterning techniques form the basis of soft lithography: Microcontact Printing (mCP) Replica Molding (REM) Microtransfer Molding (mTM) Micromolding in Capillary (MIMIC) Solvent Assisted Micromolding (SAMIM)

Technical Program:

Part I: Lectures (8:00 am – 12:00 pm, HUB 310)
8:00-8:30 am Registration and Breakfast: please pick up your name badge, course materials, and demo tickets (see details in demo session below).
8:30-9:00 am  Welcome and Overview of the Nanotech User Facility:  Dong Qin, PhD/MBA, and the Associate Director of the Center for Nanotechnology
9:00- 10:15 am Scanning Electron Microscopy and Electron Beam Lithography: Greg Golden, NTUF Research Scientist, SEM/EBL Domain Expert
10:15-10:30 am Break
10:30-12:00 pm   Soft Lithography: Dong Qin, NTUF Principal Scientist
12:00 – 1:00 pm Lunch (not provided - please use HUB facilities)
Part II: Demo and Open House (1:00 – 4:30 pm, Fluke Hall 117 and Bowen Conference Room)
1:00 – 4:30 pm  

 There are three types of demo:

  1. SEM/EDS/EBL: Greg Golden, NTUF Research Scientist (45 min)
  2. Soft Lithography: Sravani Pakala, NTUF Research Scientist (45min)
  3. NTUF Lab Tour – Raman, AFM, Confocal: Qiuming Yu, PhD, NTUF Lab Manager (30 min)

There are FOUR sessions for each demo as follows:

  1. SEM/EDS/EBL – starting time from 1:00, 2:00, 3:00, and 4:00 pm
  2. Soft Lithography – starting time from 1:15, 2:15, 3:15, and 4:15 pm
  3. NTUF Lab Tour – starting from 1:30, 2:30, 3:30, and 4:30 pm

 

Q&A Session in Bowen Conference Room from 1:00-5:00 pm:   Dong Qin, NTUF Principal Scientist

Bring a research project or idea to explore how the NTUF can support your research endeavor

PLEASE PICK UP YOUR DEMO TICKETS AT THE REGISTRATION DESK.  YOU WILL NEED A VALID DEMO TICKET TO JOIN THE DEMO SESSIONS!! 

REMEMBER:  EACH DEMO SESSION CAN ACCOMMODATE 20 PEOPLE ONLY.  IF YOU HAVE TIME CONSTRAINTS, PICK UP YOUR DEMO TICKETS AS EARLY AS POSSIBLE.   

AS WE CAN ACCOMMODATE ONLY 80 PEOPLE AT MOST FOR EACH SESSION, WE MAY NEED TO SCHEDULE ADDITIONAL DEMO SESSIONS ON FUTURE DATES

Registration:
This course is free. Please register by October 25, 2006 at: https://catalysttools.washington.edu/survey/?sid=26860&owner=ntuf

Sponsors
NSF-NNIN, CNT-UW, Zeiss, FEI, and Renishaw

Contact Information
Technical questions – Dong Qin at dqin@uw.edu
Other questions – Mack Carter at carter@chem.washington.edu

Recommended Hotels Near Univeristy:

Watertown
4242 Roosevelt Way NE
Seattle, WA 98105
For Reservations Call:1-866-944-4242 · Tel (206) 826-4242 ·
Fax(206) 315-4242
http://www.watertownseattle.com/
reservations@watertownseattle.com
(Has Airport Towncar Service Available)

University Inn
4140 Roosevelt Way NE
Seattle, WA 98105
Phone: 206-632-5055
Fax: 206-547-4937
www.universityinnseattle.com
www.universityinnseattle.com
(Has Airport Towncar Service Available)

Silver Clouds Inn
5036 - 25th Avenue NE
Seattle, WA 98105
Phone: 206-526-5200
www.scinns.com/universi.htm

Chambered Nautilus Bed and Breakfast Inn
5005 22nd Ave NE
Seattle, WA 98105
1-800-545-8459 / 206-522-2536
Fax: 206-528-0898
http://www.chamberednautilus.com/
Joyce Schulte and Steve Poole: Innkeepers/owners
(Known for having great breakfasts)

College Inn
4000 University Way NE
Seattle, WA 98105
Tel : (206) 633-4441
Fax : (206) 547-1335
http://www.collegeinnseattle.com/
( Located across from the university it provides a low cost alternative)


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