2011 |
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Xu, Ming; Nguyen, Andrew; Lee, Evans; Lee, Jared Ahmad; Cruse, James P; Cobb, Corie Lynn; Salinas, Martin Jeff; Sheyner, Anchel; Gold, Ezra Robert; Lane, John W Twin chamber processing system Patent US20110265951A1, 2011. Abstract | Links | Tags: semiconductor processing @patent{xu_twin_2011, Methods and apparatus for twin chamber processing systems are disclosed, and, in some embodiments, may include a first process chamber and a second process chamber having independent processing volumes and a plurality of shared resources between the first and second process chambers. In some embodiments, the shared resources include at least one of a shared vacuum pump, a shared gas panel, or a shared heat transfer source. | |
Lee, Jared Ahmad; Cruse, James P; Nguyen, Andrew; Cobb, Corie Lynn; Xu, Ming; Salinas, Martin Jeff; Sheyner, Anchel Process chambers having shared resources and methods of use thereof Patent US20110269314A1, 2011. Abstract | Links | Tags: semiconductor processing @patent{lee_process_2011, Process chambers having shared resources and methods of use are provided. In some embodiments, substrate processing systems may include a first process chamber having a first substrate support disposed within the first process chamber, wherein the first substrate support has a first heater and a first cooling plate to control a temperature of the first substrate support; a second process chamber having a second substrate support disposed within the second process chamber, wherein the second substrate support has a second heater and a second cooling plate to control a temperature of the second substrate support; and a shared heat transfer fluid source having an outlet to provide a heat transfer fluid to the first cooling plate and the second cooling plate and an inlet to receive the heat transfer fluid from the first cooling plate and the second cooling plate. | |
Cruse, James P; Gold, Ezra Robert; Lee, Jared Ahmad; Xu, Ming; Cobb, Corie Lynn; Nguyen, Andrew; Lane, John W Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control Patent US20110265883A1, 2011. Abstract | Links | Tags: semiconductor processing @patent{cruse_methods_2011, Methods and apparatus for gas delivery to a process chamber are provided herein. In some embodiments, an apparatus for processing substrates may include a mass flow controller to provide a desired total fluid flow; a first flow control manifold comprising a first inlet, a first outlet, and a first plurality of orifices selectably coupled therebetween, wherein the first inlet is coupled to the mass flow controller; and a second flow control manifold comprising a second inlet, a second outlet, and a second plurality of orifices selectably coupled therebetween, wherein the second inlet is coupled to the mass flow controller; wherein a desired flow ratio between the first outlet and the second outlet is selectably obtainable when causing the fluid to flow through one or more of the first plurality of orifices of the first manifold and one or more of the second plurality of orifices of the second manifold. | |
Littau, Karl A; Cobb, Corie L; Spengler, Nils; Solberg, Scott; Weisberg, Michael; Chang, Norinne; Rodkin, Alexandra Developments in MEMS scale printable alkaline and Li-ion technology Proceedings Article In: Micro- and Nanotechnology Sensors, Systems, and Applications III, pp. 80311L, International Society for Optics and Photonics, 2011. Abstract | Links | Tags: additive manufacturing, Co-extrusion, MEMS, printed batteries @inproceedings{littau_developments_2011, Two technologies for MEMS (Microelectromechanical Systems) scale cell formation are discussed. First, the fabrication of planar alkaline cell batteries compatible with MEMS scale power storage applications is shown. Both mm scale and sub-mm scale individual cells and batteries have been constructed. The chosen coplanar electrode geometry allows for easy fabrication of series connected cells enabling higher voltage while simplifying the cell sealing and electrode formation. The Zn/Ag alkaline system is used due to the large operating voltage, inherent charge capacity, long shelf life, and ease of fabrication. Several cells have been constructed using both plated and spun-on silver. The plated cells are shown to be limited in performance due to inadequate surface area and porosity; however, the cells made from spun-on colloidal silver show reasonable charge capacity and power performance with current densities of up to 200 uA/mm$^textrm2$ and charge capacities of up to 18 mA-s/mm$^textrm2$. Second, a new printing method for interdigitated 3-D cells is introduced. A microfluidic printhead capable of dispensing multiple materials at high resolution and aspect ratio is described and used to form fine interdigitated cell features which show >10 times improvement in energy density. Representative structures enabled by this method are modeled, and the energy and power density improvements are reported. | |
2010 |
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Cobb, Corie L; Agogino, Alice M Case-Based Reasoning for Evolutionary MEMS Design Journal Article In: Journal of Computing and Information Science in Engineering, vol. 10, no. 3, pp. 031005, 2010, ISSN: 1530-9827. Abstract | Links | Tags: case-based reasoning, design synthesis, evolutionary algorithms, MEMS, optimization @article{cobb_case-based_2010, A knowledge-based computer-aided design tool for microelectromechanical systems (MEMS) design synthesis called case-based synthesis of MEMS (CaSyn-MEMS) has been developed. MEMS-based technologies have the potential to revolutionize many consumer products and to create new market opportunities in areas such as biotechnology, aerospace, and data communications. However, the commercialization of MEMS still faces many challenges due to a lack of efficient computer-aided design tools that can assist designers during the early conceptual phases of the design process. CaSyn-MEMS combines a case-based reasoning (CBR) algorithm and a MEMS case library with parametric optimization and a multi-objective genetic algorithm (MOGA) to synthesize new MEMS design topologies that meet or improve upon a designer’s specifications. CBR is an artificial intelligence methodology that uses past design solutions and adapts them to solve current problems. Having the ability to draw upon past design knowledge is advantageous to MEMS designers, allowing reuse and modification of previously successful designs to accelerate the design process. To enable knowledge reuse, a hierarchical MEMS case library has been created. A reasoning algorithm retrieves cases with solved problems similar to the current design problem. Focusing on resonators as a case study, case retrieval demonstrated an 82% success rate. Using the retrieved cases, approximate design solutions were proposed by first adapting cases with parametric optimization, resulting in a 25% reduction in design area on average while bringing designs within 2% of the frequency goal. In situations where parametric optimization was not sufficient, a more radical design adaptation was performed through the use of MOGA. CBR provided MOGA with good starting points for optimization, allowing efficient convergence to higher quantities of Pareto optimal design concepts while reducing design area by up to 43% and meeting frequency goals within 5%. | |
2008 |
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Cobb, Corie L; Agogino, Alice M; Beckman, Sara L; Speer, Leslie Enabling and Characterizing Twenty-First Century Skills in New Product Development Teams Journal Article In: International Journal of Engineering Education, vol. 24, no. 2, pp. 420–433, 2008. Abstract | Links | Tags: engineering education, new product development @article{cobb_enabling_2008, This paper outlines a New Product Development (NPD) class designed to enable `flat world' skillsÐmultidisciplinary teamwork, rapid prototyping, creativity, business, entrepreneurship and human-centred design. This course aims to develop the skills necessary for successful product development in today's competitive global marketplace. To accomplish a truly multidisciplinary dimension, the graduate course draws students from UC Berkeley's Engineering, Business, and Information Systems departments, as well as from the Industrial Design programme at the California College of the Arts. Students from all of these programmes and colleges join forces on four to five person product development teams to step through the new product development process in detail, learning about the available tools and techniques to execute each step along the way. Each student brings his/her own disciplinary perspective to the team effort and must learn to synthesize that perspective with those of the other students in the group to develop a sound, marketable product or service. Students depart the semester understanding new product development processes as well as useful tools, techniques and organizational structures that support new product development practice. In recent years, we have added material on social entrepreneurship and have encouraged socially-conscious design projects. This paper presents quantitative and | |
Cobb, Corie L; Zhang, Ying; Agogino, Alice M; Mangold, Jennifer Knowledge-Based Evolutionary Linkage in MEMS Design Synthesis Book Chapter In: Linkage in Evolutionary Computation, vol. 157, pp. 461–483, Springer, Berlin, Heidelberg, 2008, ISBN: 978-3-540-85067-0 978-3-540-85068-7. Abstract | Links | Tags: case-based reasoning, design synthesis, evolutionary algorithms, MEMS, optimization @inbook{cobb_knowledge-based_2008, Multi-objective Genetic Algorithms (MOGA) and Case-based Reasoning (CBR) have proven successful in the design of MEMS (Micro-electro-mechanical Systems) suspension systems. This work focuses on CBR, a knowledge-based algorithm, and MOGA to examine how biological analogs that exist between our evolutionary system and nature can be leveraged to produce new promising MEMS designs. Object-oriented data structures of primitive and complex genetic algorithm (GA) elements, using a component-based genotype representation, have been developed to restrict genetic operations to produce feasible design combinations as required by physical limitations or practical constraints. Through the utilization of this data structure, virtual linkage between genes and chromosomes are coded into the properties of pre-defined GA objects. The design challenge involves selecting the right primitive elements, associated data structures, and linkage information that promise to produce the best gene pool for new functional requirements. Our MEMS synthesis framework, with the integration of MOGA and CBR algorithms, deals with the linkage problem by integrating a component-based genotype representation with a CBR automated knowledge-base inspired by biomimetic ontology. Biomimetics is proposed as a means to examine and classify functional requirements so that case-based reasoning algorithms can be used to map design requirements to promising initial conceptual designs and appropriate GA primitives. CBR provides MOGA with good linkage information through past MEMS design cases while MOGA inherits that linkage information through our component-bsased genotype representation. A MEMS resonator test case is used to demonstrate this methodology. | |
Cobb, Corie Lynn Case-based reasoning for MEMS design synthesis PhD Thesis University of California, Berkeley, 2008. Links | Tags: case-based reasoning, design synthesis, evolutionary algorithms, MEMS, optimization @phdthesis{cobb_case-based_2008, | |
2007 |
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Cobb, Corie L; Zhang, Ying; Agogino, Alice M; Mangold, Jennifer Case-based reasoning and object-oriented data structures exploit biological analogs to generate virtual evolutionary linkages Proceedings Article In: 2007 IEEE Congress on Evolutionary Computation, pp. 334–341, IEEE, 2007. Abstract | Links | Tags: case-based reasoning, design synthesis, evolutionary algorithms, MEMS, optimization @inproceedings{cobb_case-based_2007, Multiobjective genetic algorithms (MOGA) and case-based reasoning (CBR) have proven successful in the design of MEMS (microelectromechanical systems) suspension systems. Object-oriented data structures of primitive and complex genetic algorithm (GA) elements have been developed to restrict genetic operations to produce feasible design combinations as required by physical limitations or practical constraints. Thus, virtual linkage between genes and chromosomes are coded into the properties of pre-defined GA objects. A new design problem requires selecting the right primitive elements, associated data structures, and linkages that promise to produce the best gene pool for new functional requirements. In this paper, biomimetics is proposed as a means to examine and classify functional requirements so that case-based reasoning algorithms can be used to map design requirements to promising initial conceptual designs and appropriate GA primitives. The concept is demonstrated using micro-mechanical resonators. | |
Cobb, Corie L; Zhang, Ying; Agogino, Alice M MEMS design synthesis: integrating case-based reasoning and multi-objective genetic algorithms Proceedings Article In: Smart Structures, Devices, and Systems III, pp. 641419, International Society for Optics and Photonics, Adelaide, Australia, 2007. Abstract | Links | Tags: case-based reasoning, design synthesis, evolutionary algorithms, MEMS, optimization @inproceedings{cobb_mems_2007, A case-based reasoning (CBR) knowledge base has been incorporated into a Micro-Electro-Mechanical Systems (MEMS) design tool that uses a multi-objective genetic algorithm (MOGA) to synthesize and optimize conceptual designs. CBR utilizes previously successful MEMS designs and sub-assemblies as building blocks stored in an indexed case library, which serves as the knowledge base for the synthesis process. Designs in the case library are represented in a parameterized object-oriented format, incorporating MEMS domain knowledge into the design synthesis loop as well as restrictions for the genetic operations of mutation and crossover for MOGA optimization. Reasoning tools locate cases in the design library with solved problems similar to the current design problem and suggest promising conceptual designs which have the potential to be starting design populations for a MOGA evolutionary optimization process, to further generate more MEMS designs concepts. Surface micro-machined resonators are used as an example to introduce this integrated MEMS design synthesis process. The results of testing on resonator case studies demonstrate how the combination of CBR and MOGA synthesis tools can help increase the number of optimal design concepts presented to MEMS designers. | |
Cobb, Corie L; Agogino, Alice M; Beckman, Sara L Longitudinal Study of Learning Outcomes in a New Product Development Class Proceedings Article In: ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications and the 19th Reliability, Stress Analysis, and Failure Prevention Conference, pp. 643–651, ASME, Las Vegas, Nevada, 2007, ISBN: 0-7918-4805-1. Abstract | Links | Tags: engineering education, new product development @inproceedings{cobb_longitudinal_2007, This paper reports on a longitudinal study of lessons learned from a graduate-level New Product Development course taught at the University of California at Berkeley, comparing lessons learned by students during the course with alumni perceptions one to ten years after graduation. Previous research on student learning outcomes in New Product Development (NPD) found that on the last day of class students identify working in multifunctional teams and understanding user needs as their most important lessons learned. This study raises the question of whether or not students maintain the same emphasis on learning outcomes once they have moved on to careers in industry. To answer this question, we conducted 21 in-depth interviews with alumni who took the course between 1995–2005 and are now working in industry. A qualitative and quantitative analysis of the alumni interviews reveals that former students still highly value what they learned about team work and understanding user needs, but see more value in tools for concept generation, prototyping, and testing after gaining work experience. The results reaffirm the value of engaging students in multidisciplinary design projects as a vehicle for developing the professional skills needed in today’s competitive new product development environment. | |
2006 |
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Cobb, Corie L; Agogino, Alice M Case-Based Reasoning for the Design of Micro-Electro-Mechanical Systems Proceedings Article In: 26th Computers and Information in Engineering Conference, pp. 109–118, ASME, Philadelphia, Pennsylvania, 2006, ISBN: 0-7918-4257-8. Abstract | Links | Tags: case-based reasoning, design synthesis, MEMS, optimization @inproceedings{cobb_case-based_2006, Although Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of research, many MEMS designers still rely on back-of-the-envelope calculations due to a lack of efficient computer-aided design (CAD) tools that can assist with the initial stages of design exploration. This paper introduces case-based reasoning (CBR) techniques to the design of MEMS, as part of a larger MEMS synthesis framework currently under development at UC Berkeley. Having the ability to draw upon past design knowledge is advantageous to the MEMS designer, allowing reuse and modification of previous successful designs to help deal with the complexities of a new design problem. CBR utilizes past successful MEMS designs and sub-assemblies as building blocks stored in an indexed library. Reasoning tools find cases in the library with solved problems similar to the current design problem in order to propose promising conceptual designs. This paper discusses case representation and case library design as well as the results of case retrieval studies, focusing on MEMS resonant structures. The paper recommends strategies for integrating the MEMS case library with evolutionary computation when parameter optimization over the retrieved conceptual designs is not sufficient or there are gaps of knowledge in the case library. |
2011 |
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Twin chamber processing system Patent US20110265951A1, 2011. | |
Process chambers having shared resources and methods of use thereof Patent US20110269314A1, 2011. | |
Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control Patent US20110265883A1, 2011. | |
Developments in MEMS scale printable alkaline and Li-ion technology Proceedings Article In: Micro- and Nanotechnology Sensors, Systems, and Applications III, pp. 80311L, International Society for Optics and Photonics, 2011. | |
2010 |
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Case-Based Reasoning for Evolutionary MEMS Design Journal Article In: Journal of Computing and Information Science in Engineering, vol. 10, no. 3, pp. 031005, 2010, ISSN: 1530-9827. | |
2008 |
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Enabling and Characterizing Twenty-First Century Skills in New Product Development Teams Journal Article In: International Journal of Engineering Education, vol. 24, no. 2, pp. 420–433, 2008. | |
Knowledge-Based Evolutionary Linkage in MEMS Design Synthesis Book Chapter In: Linkage in Evolutionary Computation, vol. 157, pp. 461–483, Springer, Berlin, Heidelberg, 2008, ISBN: 978-3-540-85067-0 978-3-540-85068-7. | |
Case-based reasoning for MEMS design synthesis PhD Thesis University of California, Berkeley, 2008. | |
2007 |
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Case-based reasoning and object-oriented data structures exploit biological analogs to generate virtual evolutionary linkages Proceedings Article In: 2007 IEEE Congress on Evolutionary Computation, pp. 334–341, IEEE, 2007. | |
MEMS design synthesis: integrating case-based reasoning and multi-objective genetic algorithms Proceedings Article In: Smart Structures, Devices, and Systems III, pp. 641419, International Society for Optics and Photonics, Adelaide, Australia, 2007. | |
Longitudinal Study of Learning Outcomes in a New Product Development Class Proceedings Article In: ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications and the 19th Reliability, Stress Analysis, and Failure Prevention Conference, pp. 643–651, ASME, Las Vegas, Nevada, 2007, ISBN: 0-7918-4805-1. | |
2006 |
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Case-Based Reasoning for the Design of Micro-Electro-Mechanical Systems Proceedings Article In: 26th Computers and Information in Engineering Conference, pp. 109–118, ASME, Philadelphia, Pennsylvania, 2006, ISBN: 0-7918-4257-8. |