Sensors & Micro-Electronic Mechanical Systems [MEMS]

CIMS has started recently the design of several sensors and MEMS based on EAP's. One example of sensors is temperature sensor of chip size, and it can measure temperature in a small area with high spatial resolution (less than mm). This can be applied to the area of high heat flux with non-uniform temperature distributions, such as the interface to chips and pumped laser diodes.

CIMS is designing a few Bio-MEMS (1) surface plasmon resonance (SPR) and (2) micro-pump based on flemion/conducting polymer.