Sensors & Micro-Electronic Mechanical Systems
CIMS has started recently the design of several
sensors and MEMS based on EAP's. One example of sensors is
temperature sensor of chip size, and it can measure temperature
in a small area with high spatial resolution (less than mm).
This can be applied to the area of high heat flux with non-uniform
temperature distributions, such as the interface to chips
and pumped laser diodes.
CIMS is designing a few Bio-MEMS (1) surface plasmon resonance (SPR) and (2) micro-pump based on flemion/conducting polymer.