Chemical Patterning of Ultrathin Polymer Films by Direct-Write Multiphoton Lithography

Citation

Jeon, H.; Schmidt, R.; Barton, J. E.; Hwang, D. J.; Gamble, L. J.; Castner, D. G.; Grigoropoulos, C. P.; & Healy, K. E. (2011). Chemical Patterning of Ultrathin Polymer Films by Direct-Write Multiphoton Lithography. J Am Chem Soc, 133(16), 6138-6141.

Abstract

We applied 2-photon laser ablation to write subdiffraction nanoscale chemical patterns into ultrathin polymer films under ambient conditions. Poly(ethylene glycol) methacrylate brush layers were prepared on quartz substrates via surface-initiated atom-transfer radical polymerization and ablated to expose the underlying substrate using the nonlinear 2-photon absorbance of a frequency-doubled Ti:sapphire femtosecond laser. Single-shot ablation thresholds of polymer films were similar to 1.5 times smaller than that of a quartz substrate, which allowed patterning of nanoscale features without damage to the underlying substrate. At a 1/e(2) laser spot diameter of 0.86 mu m, the features of exposed substrate approached similar to 80 nm, well below the diffraction limit for 400 nm light. Ablated features were chemically distinct and amenable to chemical modification.

Keyword(s)

brushes
features
femtosecond
glass
laser-ablation
nanosecond
pulses
transfer radical polymerization

Notes

792BM
Times Cited:12
Cited References Count:22

Reference Type

Journal Article

Secondary Title

J Am Chem Soc

Author(s)

Jeon, H.
Schmidt, R.
Barton, J. E.
Hwang, D. J.
Gamble, L. J.
Castner, D. G.
Grigoropoulos, C. P.
Healy, K. E.

Year Published

2011

Date Published

1745712000

Volume Number

133

Issue Number

16

Pages

6138-6141

DOI

Doi 10.1021/Ja200313q