Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic and Hydrophobic Surface Chemistries

Citation

Malkov, Galiya S.; Martin, Ina T.; Schwisow, Whitney B.; Chandler, John P.; Wickes, Bronwyn T.; Gamble, Lara J.; Castner, David G.; & Fisher, Ellen R. (2008). Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic and Hydrophobic Surface Chemistries. Plasma Processes and Polymers, 5(2), 129-145.

Abstract

High-fidelity micrometer-scale patterns of alternating hydrophobic and hydrophilic materials were created on polystyrene using pulsed plasma polymerization. The hydrophobic material was formed using C3F8. Grids with 80–100 µm holes were used to generate patterns with acrylic acid, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidinone, N-vinylformamide, allylamine, and hexylamine. The materials were characterized with angle-resolved XPS, spectroscopic ellipsometry, and static CA measurements. Excellent pattern fidelity with all monomers was confirmed with SEM, SAM, XPS imaging, and static ToF-SIMS imaging.

Keyword(s)

ESCA/XPS
fluorinated coatings
micropatterning
plasma polymerization
pulsed discharges

Reference Type

Journal Article

Secondary Title

Plasma Processes and Polymers

Author(s)

Malkov, Galiya S.
Martin, Ina T.
Schwisow, Whitney B.
Chandler, John P.
Wickes, Bronwyn T.
Gamble, Lara J.
Castner, David G.
Fisher, Ellen R.

Year Published

2008

Date Published

1199145600

Volume Number

5

Issue Number

2

Pages

129-145

ISSN/ISBN

1612-8869

DOI

10.1002/ppap.200700118