Introductory to Micro Sensors and Actuators

Instructor: Wei-Chih Wang, Ph.D.                                                
Office: S606 (Phone: extension 3142)
Grading: 3 credits
Class Time: MTW 10:00-12:00 AM (S607)

Syllabus

Objectives

To introduce the student to some basic principles and techniques of micro sensors and actuators

Course Outline:

•Week 1. Introduction to basic principal of micro sensors and actuators

•Week 1 Electrostatic transducers – capacitive sensors, electrostatic actuators

•Week 1 Cantilever transducer - mechanical resonances, damping, Q factor, and stress analysis

•Week 1 Composite structure

•Week 2 Magnetic transducers – typical and non-typical applications of magnetic sensors and actuators

•Week 3. Piezoelectric transducers – devices and applications using piezoelectric materials (i.e. PZT, PVDF, ZnO and PTF)

•Week 4 Resistive transducers – resistive sensors and actuators (i.e. strain gage, anemometer, bubble jet, SMA, optothermal actuator, etc.)

•Week 4 piezoresistive and Electrostrictive and Magnetostrictive transducers

•Week 5. Optical Transducers – optical techniques in devices and applications.

- Intensity modulation

- phase modulation

- other optical techniques

extra class note on Fabry-Perot Interferometer

Week 6 Light sources

Week 7 Detectors

•Week 7 Smart Materials –electro active polymers (dielectric actuator, ionic polymers, etc.)

•Week 8 Introduction to Biosensors – materials and applications.

•Week 8 Final project presentation

Textbooks:

- Fundamentals of Photonics, B. Saleh, John Wiley& Sons

- Fiber optic Sensors, E. Udd, John Wiley& Sons

- Selected papers in micro sensors, MEMS devices, smart materials and micro actuators.

- EAP Handbook, SPIE

- Mechanical Sensors, in semiconductor Sensors, B. Kloeck and N.F. de Rooji

-  J. Judy, Ph.D. Thesis, Berkeley, 1996

- Feynman, et al., LEctures on Physics, Vol.2

- Microsystem Design, Santuria, Kluwer Academic, 2001

HW 1

HW 2

HW 3 laser profile data file

HW 4

Proposal for Design Projects

Final Presentations

Presentation format and direction

Presentation example